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The KC Series High Vacuum Oil Diffusion Pumps are ideal for high vacuum environments due to their high pumping speeds and extremely low backstreaming rates. This article provides a detailed overview of their technical features, benefits, application areas, and frequently asked questions.
Discover the KC Series High Vacuum Oil Diffusion Pumps, offering exceptional ultimate pressure, high pumping speed, and low backstreaming rates, suitable for various high vacuum applications. Learn about their technical specifications, advantages, and application fields.
High Pumping Speed: The KC Series offers pumping speeds ranging from 7000 L/s to 35000 L/s, meeting various high vacuum needs.
Extremely Low Backstreaming Rate: Backstreaming rate ≤1.5×10³, ensuring a clean high vacuum environment.
Stable Performance: Ultimate pressure ≤5×10⁻⁵ Pa, guaranteeing long-term stable high vacuum conditions.
Energy-Efficient Design: Optimized heating power and cooling water consumption reduce operating costs.
Wide Applicability: Suitable for various high vacuum applications, such as scientific research, semiconductor manufacturing, and vacuum coating.
Scientific Research: Used in high vacuum physics experiments and materials science research.
Semiconductor Manufacturing: Provides high vacuum environments in chip manufacturing processes.
Vacuum Coating: Used in optical coating, decorative coating, and other processes.
Aerospace: Provides high vacuum conditions for spacecraft simulation testing.
| Model | KC - 400 | KC - 500 | KC - 650 | KC - 800 | KC - 900 |
|---|---|---|---|---|---|
| Ultimate Pressure (Pa) | ≤5×10⁻⁵ | ≤5×10⁻⁵ | ≤5×10⁻⁵ | ≤5×10⁻⁵ | ≤5×10⁻⁵ |
| Pumping Speed (L/s) | ≥7000 | ≥11000 | ≥18400 | ≥22000 | ≥35000 |
| Critical Foreline Pressure (Pa) | ≥60 | ≥60 | ≥60 | ≥60 | ≥60 |
| Backstreaming Rate | ≤1.5×10³ | ≤1.5×10³ | ≤1.5×10³ | ≤1.5×10³ | ≤1.5×10³ |
| Heating Power (kW) | 8.1 | 12 | 12 | 15 | 24 |
| Power Supply Voltage (V) | 380 | 380 | 380 | 380 | 380 |
| Cooling Water Consumption (L/h) | 420 | 860 | 920 | 1180 | 1330 |
| Pump Oil Type | 275# Silicone Oil | 275# Silicone Oil | 275# Silicone Oil | 275# Silicone Oil | 275# Silicone Oil |
| Pump Oil Consumption (L) | 4 - 4.5 | 5 - 6 | 7 | 10 | 11 - 12 |
| Recommended Foreline Pump Speed (L/s) | 70 | 140 | 140 | 300 | 300 |
| Dimensions (L × W × H, mm) | 985×600×1105 | 1100×700×1240 | 1155×750×1235 | 1300×970×1700 | 1760×1100×1855 |
| Weight (kg) | 80 | 260 | 300 | 700 | 910 |
Case: A semiconductor manufacturing company successfully implemented the KC-900 High Vacuum Oil Diffusion Pump, achieving a high vacuum environment in the chip manufacturing process, significantly improving production efficiency and product quality.
Advantages:
High pumping speed, quickly achieving high vacuum conditions.
Extremely low backstreaming rate, ensuring a clean environment.
Stable performance, reliable long-term operation.
Energy-efficient design, reducing operating costs.
Uses:
Scientific research
Semiconductor manufacturing
Vacuum coating
Aerospace
Scientific Research: High vacuum physics experiments, materials science research.
Semiconductor Manufacturing: High vacuum environments in chip manufacturing processes.
Vacuum Coating: Optical coating, decorative coating, and other processes.
Aerospace: High vacuum conditions for spacecraft simulation testing.
Foreline Pump: Use a foreline pump with matching pumping speed.
Cooling System: Ensure stable cooling water supply.
Control System: Equip with a high-precision vacuum control system.
Start Foreline Pump: First, start the foreline pump to establish a preliminary vacuum.
Start Diffusion Pump: Start the diffusion pump when the foreline pressure reaches the critical value.
Monitor Vacuum Level: Monitor the vacuum level in real-time and adjust operating parameters.
Shutdown: First, turn off the diffusion pump, then turn off the foreline pump.
Installation Location: Choose a well-ventilated, vibration-free installation location.
Connect Pipes: Ensure tight pipe connections with no leaks.
Power Connection: Connect the power supply according to the voltage requirements.
Cooling Water Connection: Connect the cooling water system, ensuring stable water flow.
: What is the ultimate pressure of the KC Series Diffusion Pumps?
A: The ultimate pressure is ≤5×10⁻⁵ Pa.
: What is the pumping speed range of the KC Series Diffusion Pumps?
A: The pumping speed ranges from 7000 L/s to 35000 L/s.
: What is the backstreaming rate of the KC Series Diffusion Pumps?
A: The backstreaming rate is ≤1.5×10³.
: What is the heating power of the KC Series Diffusion Pumps?
A: The heating power ranges from 8.1 kW to 24 kW.
: What is the power supply voltage of the KC Series Diffusion Pumps?
A: The power supply voltage is 380 V.
: What is the cooling water consumption of the KC Series Diffusion Pumps?
A: The cooling water consumption ranges from 420 L/h to 1330 L/h.
: What type of pump oil is used in the KC Series Diffusion Pumps?
A: 275# Silicone Oil is used.
: What is the pump oil consumption of the KC Series Diffusion Pumps?
A: The pump oil consumption ranges from 4 L to 12 L.
: What is the recommended foreline pump speed for the KC Series Diffusion Pumps?
A: The recommended foreline pump speed ranges from 70 L/s to 300 L/s.
: What are the dimensions and weight of the KC Series Diffusion Pumps?
A: The dimensions and weight vary by model; please refer to the technical specifications table.
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