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The RBM-350 Thin Film Transmitter delivers ultra-accurate vacuum pressure measurement for semiconductor, industrial, and research applications. With rapid response, contamination protection, and temperature compensation, it ensures stable and precise readings across a 0.1–1000 Torr range.
The RBM-350 Thin Film Transmitter is a high-precision vacuum pressure sensor designed for semiconductor manufacturing (etching, CVD, PVD, ALD), industrial vacuum systems, and display production. Featuring fast stabilization, temperature compensation, and contamination resistance, it offers a full measurement range from 0.1 Torr to 1000 Torr for reliable long-term performance.
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The RBM-350 Thin Film Transmitter is a high-accuracy vacuum pressure sensor optimized for semiconductor manufacturing (etching, CVD, PVD, ALD), data storage, display production, and industrial vacuum systems. Engineered for harsh environments, it provides fast recovery, contamination resistance, and temperature compensation to ensure long-term measurement stability.
Wide Measurement Range: 0.1 Torr to 1000 Torr for versatile applications
Fast Stabilization: Ready for use immediately after power-on
Contamination Protection: Shields sensor from environmental damage
Temperature Compensation: Minimizes drift due to thermal fluctuations
Long-Term Signal Stability: Maintains precision over extended operation
Semiconductor Manufacturing: Etching, CVD, PVD, ALD processes
Display Production: OLED/LCD fabrication equipment
Industrial Vacuum Systems: Coating, furnace, and vacuum chamber monitoring
Research & Laboratories: High-precision vacuum experiments.
RBM-350 Thin Film Transmitter Technical Specifications
| Parameter | Specification |
| Measuring Range | 133,000–13.3 Pa / 13,300–1.33 Pa / 1,330–0.133 Pa / 133–0.0133 Pa / 13.3–0.00133 Pa |
| Power Supply | +14 VDC to +30 VDC (Vpp ≤ 0.5 V) |
| Output Impedance | 0 Ω (short-circuit protected) |
| Load Impedance | 10 kΩ |
| Calibration Method | Full digital key calibration |
| Electrical Connection | DB15 pin connector |
| Weight | ≤ 300 g |
| Dimensions | Approx. 55 × 120 mm (diameter × height) |
| Accuracy Class | 0.25% FS |
| Reading Error | 0.15% of reading |
| Zero Drift | 0.005% FS/°C |
| Full-Scale Drift | 0.04% FS/°C |
| Resolution | 0.003% FS |
| Gas Dependency | None (compatible with various gases) |
| Operating Current | ≤ 15 mA |
| Output Voltage | –0.1 VDC to +10.5 VDC |
| Pressure-Voltage Linearity | Linear output |
| Response Time | ≥ 10 kPa (FS) 40 ms / ≥ 1 kPa (FS) 130 ms |
| Max. Pressure (Absolute) | 400 kPa / 260 kPa / 130 kPa (model-dependent) |
| Optional Features | Analog output (0–10 V), control points (2), multiple interfaces (KF16, CF16, VCR plug/socket) |
Ideal for semiconductor manufacturing, vacuum coating, industrial vacuum systems, and research labs requiring high-precision vacuum measurement.
Accuracy class 0.25% FS with a reading error of just 0.15%, ensuring reliable data.
Yes, built-in temperature compensation reduces measurement drift due to thermal changes.
Features fast recovery for quick stabilization post-exposure.
Yes, its anti-contamination design prolongs sensor life in demanding environments.
Provides a linear voltage output (–0.1 V to +10.5 V), compatible with most control systems.
Optional KF16, CF16, VCR plug/socket interfaces for flexible integration.
Up to 400 kPa (absolute) depending on the model.
Periodic digital key calibration is recommended to maintain accuracy.
Standard models are for inert gases; contact us for corrosion-resistant variants.
Address : No 19, Zhanqianli, Dong'an, Jimei District, Xiamen, Fujian Province, China
Email : mike@xiamenbest.com vacuum@xiamenbest.com WhatsApp ： +8613959235484 Phone： +8613959235484 +8615880223078
