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CF 6-Way Crosses are specialized vacuum fittings with six ConFlat flange connections, ensuring leak-proof performance in UHV/XHV environments. This guide covers their structure, technical specs (CF16-CF100 models), key applications, and FAQs for industries like semiconductor processing, particle accelerators, and space testing.
Discover CF 6-Way Crosses—precision vacuum fittings designed for ultra-high vacuum (UHV) systems. Featuring six ConFlat (CF) ports, superior sealing, and applications in semiconductor manufacturing, research, and aerospace.
The Vacuum Fitting - CF 6-Way Cross is a critical component for ultra-high vacuum (UHV) and extreme high vacuum (XHV) systems. The "CF" stands for ConFlat flange, which uses a metal gasket (typically copper) for hermetic sealing. The "6-Way" design provides six standardized ports in a cross-shaped configuration, enabling multi-directional connections for complex vacuum setups.
Ideal for gas distribution, pump integration, and instrumentation, these fittings are widely used in particle accelerators, thin-film deposition systems, and space simulation chambers.
Flange Body: Precision-machined stainless steel (316L) or aluminum, with flatness ≤0.001mm.
Connection Ports: Six CF flanges (ISO/KF-compatible), available in CF16 to CF100 sizes.
Sealing Gasket: Oxygen-free copper (OFHC) standard (optional silver or gold for high-purity systems).
|
Feature |
Description |
|
UHV/XHV Compatibility |
Operates at 10⁻⁷ to 10⁻¹² Torr |
|
Multi-Port Design |
Connects up to 6 vacuum lines or devices |
|
Corrosion Resistance |
316L stainless steel for plasma/chemical resistance |
|
Easy Installation |
Pre-aligned bolt holes for quick assembly |
Particle Accelerators: Links beamlines, pumps, and diagnostics.
Electron Microscopes: Integrates specimen chambers with detectors.
|
Equipment |
Function |
|
CVD/PVD Systems |
Distributes process gases uniformly |
|
Etching Tools |
Manages multiple reactive gas inlets |
Satellite Testing: Simulates space vacuum with multiple sensor feeds.
Ion Thrusters: Controls propellant flow in spacecraft propulsion.
| Model | Part No. | Size A (mm) | Max Pressure Rating |
| CF16 | 55016-164 | 38.1 | ≤5×10⁻¹⁰ Torr |
| CF25 | 55016-254 | 51.8 | ≤5×10⁻¹⁰ Torr |
| CF35 | 55016-354 | 62.5 | ≤5×10⁻¹⁰ Torr |
| CF50 | 55016-504 | 81.5 | ≤5×10⁻¹⁰ Torr |
| CF63 | 55016-634 | 84.1 | ≤5×10⁻¹⁰ Torr |
| CF80 | 55016-804 | 92.2 | ≤5×10⁻¹⁰ Torr |
| CF100 | 55016-1004 | 109.7 | ≤5×10⁻¹⁰ Torr |
Yes, 316L stainless steel resists most corrosive gases. For halogen environments, Hastelloy versions are recommended.
OFHC Copper: Standard for UHV.
Silver: Better for high temperatures.
Gold: Minimizes contamination in ultra-clean systems.
Use a helium mass spectrometer with sensitivity ≤1×10⁻⁹ mbar·L/s.
Yes, non-standard sizes (e.g., CF38, CF150) can be manufactured upon request.
Typically mounted in cross-configuration:
2 ports for beamlines
2 for vacuum pumps
2 for diagnostic instruments
Replace gaskets after disassembly.
Clean flanges with acetone and bake at 150°C for 24h for outgassing.
No, an adapter flange (CF-KF) is required.
Electropolished (Ra ≤0.4μm) or passivated surfaces reduce outgassing.
M6 bolts: 4.5 N·m
M8 bolts: 9.8 N·m (tighten in crisscross pattern).
Yes, compliant with MIL-STD-1540C (random vibration ≥14.1 Grms).
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