Vacuum Fittings - CF Elbow 90° (CF 90° Elbow)

CF Elbow 90° (CF 90° elbow) is a high-vacuum pipe fitting designed with ConFlat flange standards, suitable for semiconductor, aerospace, and scientific research applications, ensuring ultra-high vacuum sealing and fluid flow direction control.

Product Overview

The CF Elbow 90° is a vacuum elbow designed based on ConFlat (CF) flange standards, primarily used to change the flow direction of fluids (gases or liquids) in vacuum systems. Manufactured from high-purity stainless steel (such as 304L or 316L), it ensures high vacuum sealing and corrosion resistance, making it widely applicable in scientific research, semiconductor manufacturing, aerospace, and other fields.

Product Structure and Features

Structure Composition

CF Flange Section

Material: 304L or 316L stainless steel

Structural Features: High flatness, precision grinding to ensure ultra-high vacuum sealing

90° Bend Body Section

Material: High-purity stainless steel matching the flange

Structural Features: Precision-polished internal channel to reduce fluid resistance

Product Features

Ultra-High Vacuum Compatibility: Suitable for UHV (10⁻⁹ Pa) and XHV (10⁻¹² Pa) environments
High Sealing Performance: Extremely low leakage rate ensures system stability
Fluid Direction Change: 90° bend design optimizes pipeline layout
Corrosion and Wear Resistance: Stainless steel material adapts to harsh working conditions
Easy Installation and Maintenance: CF flange bolt connection allows for convenient disassembly

Application Fields

1. Scientific Research

Particle Accelerators: Connects vacuum pipelines to ensure stable particle beam transmission

Electron Microscopes: Maintains ultra-high vacuum environment to improve imaging accuracy

Surface Analysis Instruments (XPS/AES): Optimizes gas flow paths to ensure analysis precision

2. Semiconductor Manufacturing

Vacuum Coating Equipment: Ensures uniform thin-film deposition

Etching Equipment: Precisely controls gas flow direction to improve etching efficiency

3. Aerospace

Satellite Vacuum Testing: Simulates space environment to verify equipment reliability

Spacecraft Propulsion Systems: Optimizes propellant flow paths

Technical Specifications

CF Elbow 90° (CF 90° Elbow) Frequently Asked Questions

1. What vacuum levels is the CF 90° elbow suitable for?

Suitable for ultra-high vacuum (UHV, 10⁻⁹ Pa) and extreme high vacuum (XHV, 10⁻¹² Pa) environments.

2. What is the main material of the CF 90° elbow?

304L or 316L stainless steel, offering high corrosion resistance.

3. How is the sealing performance of the CF 90° elbow ensured?

Precision-ground CF flanges combined with metal sealing gaskets (such as copper gaskets) ensure extremely low leakage rates.

4. Can the CF 90° elbow be custom-sized?

Yes, non-standard sizes can be customized upon request.

5. What should be noted during installation of the CF 90° elbow?

Ensure flange surfaces are clean

Tighten bolts evenly to avoid uneven pressure

6. What gas media is the CF 90° elbow compatible with?

Suitable for inert gases, high-purity process gases, and corrosive gases (material compatibility should be confirmed).

7. What is the maximum temperature resistance of the CF 90° elbow?

Standard models withstand up to 300°C; high-temperature models require special treatment.

8. How is leakage detected in the CF 90° elbow?

Helium mass spectrometer leak detectors are recommended for high-precision testing.

9. Can the CF 90° elbow be used in semiconductor CVD/PVD equipment?

Yes, it is widely used in CVD (chemical vapor deposition) and PVD (physical vapor deposition) systems.

10. What is the service life of the CF 90° elbow?

Under normal operating conditions, the service life can exceed 10 years, depending on the working environment.